Optical: systems and elements – Optical modulator – Having particular chemical composition or structure
Reexamination Certificate
2006-08-22
2006-08-22
Spector, David N. (Department: 2873)
Optical: systems and elements
Optical modulator
Having particular chemical composition or structure
C257S758000, C349S158000, C438S018000, C359S245000
Reexamination Certificate
active
07095550
ABSTRACT:
A plurality of film formation layers where film formation patterns are formed, respectively, interlayer films which are formed between the plurality of film formation layers, respectively, a plurality of sub-interlayer-film wiring patterns, which are formed in film formation layers beneath the planarized interlayer films of the interlayer films, a plurality of contact holes formed in the planarized interlayer films in order to connect the plurality of sub-interlayer-film wiring patterns and the film formation patterns of layers above the planarized interlayer films, and one or more dummy patterns which are formed on a plurality of positions under the plurality of contact holes and which are formed in one or more film formation layers under the plurality of sub-interlayer-film wiring patterns, respectively so as to control the positions of the surfaces of the plurality of sub-interlayer-film wiring patterns.
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