Substrate handling apparatus

Details Substrate handling apparatus Substrate handling apparatus

1993-10-01

1995-01-24

Yuen, Henry C.

Heating

Accessory means for holding, shielding or supporting work...

432152, 432258, 432 5, 432 6, F27D 500

Patent

active

053837835

ABSTRACT:
A pusher which pushes up semiconductor wafers has wafer fixing grooves to which they are fixed. Wafer detecting sensors which detect whether the semiconductor wafers are present are positioned in side walls of the wafer fixing grooves. The pusher is composed of an grounded aluminum base material and a resin coat formed on the base material. The surface of the aluminum base material is alumite-treated. The resin coat has a thickness of approximately 20 .mu.m. The resin coat is made of Teflon.

REFERENCES:
patent: 4355974 (1982-10-01), Lee
patent: 4954079 (1990-09-01), Yamaya
patent: 5030056 (1991-07-01), Kitayama et al.
patent: 5206627 (1993-04-01), Kato

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