Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-07-06
2009-08-18
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S030000
Reexamination Certificate
active
07576835
ABSTRACT:
Embodiments of the invention relates to a substrate handler for handling a substrate, including a conditioning device for conditioning the substrate. In an embodiment, the substrate handler includes a displacing device configured to displace the substrate in a direction substantially parallel to the support surface, wherein the displacing device is configured to displace the substrate during the conditioning process from one conditioning position to one or more other conditioning positions. According to another embodiment of the invention, the substrate handler includes a float device for providing an air bed above a support surface of the substrate handler, the substrate handler being configured to support the substrate on an air bed during conditioning of the substrate.
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Hazenberg Johannes Martinus Andreas
Jacobs Hernes
Luttikhuis Bernardus Antonius Johannes
Van Beuzekom Aart Adrianus
Van Der Schoot Harmen Klaas
ASML Netherlands B.V.
Nguyen Hung Henry
Sterne Kessler Goldstein & Fox P.L.L.C.
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