Substrate gripping apparatus, substrate gripping method and...

Details Substrate gripping apparatus, substrate gripping method and... Substrate gripping apparatus, substrate gripping method and...

2005-03-28

2009-06-16

Chin, Paul T (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Fixed and moveable jaw

C414S941000

Reexamination Certificate

active

07547053

ABSTRACT:
A robot hand23having a hand body30having a reference axis J1is provided with fixed holding members40and41and a movable holding member42.The holding members40, 41and42are arranged on the hand body at angular intervals about the reference axis J1. Each of the fixed holding members40and41has a first guide part50and a second guide part51defining a V-shaped groove. The movable holding member42has a first guide part60and a second guide part61defining a V-shaped groove. Peripheral parts19of a wafer22are fit in the V-shaped grooves of the holding members40to42to grip the wafer22by the robot hand23. The first guide parts50and61are provided at their lower ends with protrusions55and65protruding toward the reference axis J1, respectively. The protrusions55and65prevent the wafer22from slipping off the holding members40to42.

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