Substrate gripper device for spin drying

Details Substrate gripper device for spin drying Substrate gripper device for spin drying

1997-05-13

1998-07-07

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

134902, F26B 1724

Patent

active

057750009

ABSTRACT:
A substrate gripper device for gripping a substrate has a rotatable substrate stage, a plurality of fixing fingers vertically mounted on an outer edge of the rotatable substrate stage and having respective horizontal substrate rests for placing thereon an outer edge of the substrate, and a plurality of swing fingers angularly movably supported on the fixing fingers, respectively, for vertically gripping the substrate in coaction with the fixing fingers. The swing fingers are normally biased to move in a closing direction toward the fixing fingers, respectively, by helical springs acting on the swing fingers. A plurality of opening pins are vertically movably disposed below the swing fingers, respectively, and movable upwardly for angularly moving the swing fingers in the opening direction against biasing forces of the helical springs. An opening mechanism is vertically movably disposed below the substrate stage for simultaneously moving the opening pins upwardly.

REFERENCES:
patent: 4651440 (1987-03-01), Karl
patent: 4724619 (1988-02-01), Poli et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5566466 (1996-10-01), Hearne
patent: 5715610 (1998-02-01), Smith, Jr. et al.

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