Substrate floating apparatus and method of manufacturing...

Material or article handling – Article supported by air and moved by mechanical or manual...

Reexamination Certificate

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C406S088000

Reexamination Certificate

active

07037063

ABSTRACT:
There are provided a substrate floating apparatus for preventing interference between a glass substrate and a floating board when floating and conveying the glass substrate and a method of manufacturing LCD devices using the substrate floating apparatus. The substrate floating apparatus includes a body into which floating fluid is supplied and which stores the floating fluid, a floating board that is placed on the top of the body and through which the floating fluid is sprayed to float the substrate to the predetermined height, and a fixing member that mechanically fixes the floating board on the top of the body. A certain process is performed while floating the substrate.

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