Substrate flat grinding device

Details Substrate flat grinding device Substrate flat grinding device

2009-01-21

2011-11-01

Nguyen, George (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With feeding of tool or work holder

C451S270000, C451S283000, C451S290000

Reexamination Certificate

active

08047897

ABSTRACT:
To provide a high-rigidity flat grinding device, a substrate flat grinding device has three fastening plate lifting-and-lowering mechanisms that have kinematic couplings and a cylinder rod that move the fastening plate upward or downward. Being a high-rigidity grinding device in which the load of the fastening plate6also is a load on the grindstone14that does the grinding, there is little deflection in the thickness distribution of the substrates that are obtained, even if they are semiconductor substrates having a large substrate diameter of 450 mm.

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Kinematic Coupling Design for Identical “Z” Axis Repeatability, Copyright © 2006 Micro Surface Engr. Inc. Http://www.precisionballs. com/.

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