Substrate elevator mechanisms

Details Substrate elevator mechanisms Substrate elevator mechanisms

1982-12-06

1985-04-30

Valenza, Joseph E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

198473, 198485, B65G 2500, B65G 6502

Patent

active

045141304

ABSTRACT:
An improved elevator mechanism for transferring ceramic substrates between a magazine and a stepwise indexable rotatable cage in a sputtering chamber includes one or more of the following: (a) a substrate carrying tray having a round pick-up rod engageable by an elevator hook for lifting and lowering the tray into and out of the chamber, (b) a tab on the hook having formed therein a groove for receiving such pick-up rod, (c) a retaining tab on the hook for preventing separation between it and the tray in the event such rod becomes unseated in such groove, (d) an inclined plane for transferring the tray from the hook to the cage to initiate travel of the cage-held tray in the chamber as the cage progressively indexes, and (e) a lifting roller for transferring the tray at the end of such travel back to the hook.

REFERENCES:
patent: 1994646 (1935-03-01), Heath
patent: 2868354 (1959-01-01), Harrison
patent: 3033345 (1962-05-01), Prymek
patent: 4118993 (1978-10-01), Miyoshi et al.

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