Substrate distribution system and a method using the same

Details Substrate distribution system and a method using the same Substrate distribution system and a method using the same

2005-01-03

2008-10-07

Fox, Charles A (Department: 3652)

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Wheeled rack

C414S937000

Reexamination Certificate

active

07431551

ABSTRACT:
A glass substrate distribution system includes a cassette, a first transmission mechanism, and a second transmission mechanism. The first transmission mechanism transmits the glass substrate to several standby positions outside the cassette. The second transmission mechanism transmits the glass substrate between the standby positions and the glass substrate.

REFERENCES:
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patent: 5850071 (1998-12-01), Makiguchi et al.
patent: 6230872 (2001-05-01), Huang et al.
patent: 6236021 (2001-05-01), Fair et al.
patent: 6273275 (2001-08-01), Kim et al.
patent: 6315028 (2001-11-01), Inoue
patent: 6749072 (2004-06-01), Matsuda et al.

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