Substrate detector with light emitting and receiving elements ar

Details Substrate detector with light emitting and receiving elements ar Substrate detector with light emitting and receiving elements ar

1992-07-24

1993-11-30

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

414938, G01V 904

Patent

active

052668126

ABSTRACT:
A detector for detecting the presence, number and arrangement of semiconductor wafers arranged face to face comprising a light emitting unit having a light emitting element for shooting light beam to each of the wafer, a light receiving unit having a light receiving element for receiving the light beam which have passed through each of the wafers, and a controller for finding the state of each of the wafers while comparing data obtained from the light beams received with reference data stored to thereby determine how each of the wafers to be processed, wherein said light emitting and receiving elements are alternately positioned corresponding to spaces each defined between a pair of the wafers.

REFERENCES:
patent: 4954721 (1990-09-01), Suzuki
patent: 4969745 (1990-11-01), Ibe
patent: 4988886 (1991-01-01), Palum et al.
patent: 5003188 (1991-03-01), Igari

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