Substrate delivering robot

Details Substrate delivering robot Substrate delivering robot

2005-05-17

2005-05-17

Underwood, Donald W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490030, C901S015000, C901S023000

Reexamination Certificate

active

06893204

ABSTRACT:
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm linked with the fixed base, a second turnable arm linked with the first arm, and a turnable fork linked with the second arm, wherein the fork comprises a plurality of first and second independent forks. The first and second forks are fixed coaxially and vertically in two stages to the forward end part of the second arm such that they can turn independently and first and second fork drive motors are disposed in the second arm.

REFERENCES:
patent: 6037733 (2000-03-01), Genov et al.
patent: 6102649 (2000-08-01), Ogawa et al.
patent: 6234738 (2001-05-01), Kimata et al.
patent: 6326755 (2001-12-01), Babbs et al.
patent: 6737826 (2004-05-01), Gilchrist
patent: 7-142551 (1995-06-01), None
patent: 9-63939 (1997-03-01), None
patent: 9-205127 (1997-08-01), None
patent: 10-247674 (1998-09-01), None
patent: 2000-133690 (2000-05-01), None
patent: 2000-167788 (2000-06-01), None
patent: WO0028587 (2000-05-01), None

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