Substrate defect inspection method, computer readable...

Details Substrate defect inspection method, computer readable... Substrate defect inspection method, computer readable...

2007-01-23

2008-08-12

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237400, C356S237500, C382S154000

Reexamination Certificate

active

07411669

ABSTRACT:
In the present invention, data on a substrate image picked up by an image pickup unit is outputted to a difference calculation unit where a difference image from a normal substrate is calculated. A synthesis calculation unit calculates a synthesized image by rotating the difference image 360 degrees by every predetermined angle about the center of the substrate and synthesizing the images. A Zernike calculation unit digitizes the synthesized image by a Zernike polynomial and outputs a concentric circle component to a determination unit where the component is compared with a previously set threshold value, so that the presence or absence of a defect on the substrate is determined. The present invention can facilitate the determination of the presence or absence of a macro defect on the substrate and reduce the time required for the determination.

REFERENCES:
patent: 5367375 (1994-11-01), Siebert
patent: 6809797 (2004-10-01), Baselmans et al.
patent: 7027143 (2006-04-01), Stokowski et al.
patent: 7038773 (2006-05-01), Kuhlmann et al.
patent: 6-18436 (1994-01-01), None
patent: 2000-235949 (2000-08-01), None
patent: 2001-168010 (2001-06-01), None
patent: 2004-85503 (2004-03-01), None

Affiliated with

Also associated with

Rating

Substrate defect inspection method, computer readable... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate defect inspection method, computer readable..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate defect inspection method, computer readable... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4019247