Substrate cooling device and substrate heat-treating apparatus

Details Substrate cooling device and substrate heat-treating apparatus Substrate cooling device and substrate heat-treating apparatus

1994-02-07

1995-05-02

Fox, John C.

Heat exchange

With retainer for removable article

Electrical component

29 2501, 118 72H, F28F 700

Patent

active

054110769

ABSTRACT:
A treating chamber includes a cooling plate assembly for supporting and cooling a substrate and an auxiliary cooling plate disposed on or adjacent a ceiling of the treating chamber. The auxiliary cooling plate reduces an atmospheric temperature in a space above the substrate supported on the cooling plate assembly to a target temperature to which the substrate is to be cooled by the cooling plate assembly. Consequently, the substrate having undergone a high temperature treatment is cooled quickly to the target temperature, and improved uniformity of temperature distribution is secured over a substrate surface after the cooling step.

REFERENCES:
patent: 5181556 (1993-01-01), Hughes
patent: 5194401 (1993-03-01), Adams et al.

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