Substrate cooling apparatus

Details Substrate cooling apparatus Substrate cooling apparatus

1994-10-13

1996-06-04

Bennett, Henry A.

Refrigeration

Processes

Circulating external gas

62383, 62161, 165 96, H01L 2168, B65G 6100

Patent

active

055222153

ABSTRACT:
A substrate cooling apparatus is provided with a cooling plate disposed in a treating chamber and Peltier elements for supporting and cooling a substrate. A target temperature setter is operable to set a target temperature to which the substrate is to be cooled and a drive device drives the Peltier elements to cool the cooling plate below the target temperature. When the substrate is found to have reached the target temperature, the substrate is raised to a position free from the thermal influence of the cooling plate, to complete a cooling treatment. Consequently, the substrate is cooled at high speed to achieve a reduced cooling time. Where predetermined process modules are used, processing efficiency is improved with a reduced number of substrate cooling elements.

REFERENCES:
patent: 3225820 (1965-12-01), Riordan
patent: 3896658 (1975-07-01), Hahn
patent: 4281708 (1981-08-01), Wing et al.
patent: 4619030 (1986-10-01), Marwick et al.
patent: 5154661 (1992-10-01), Higgins
patent: 5269146 (1993-12-01), Kerner
patent: 5281516 (1994-01-01), Stapleton et al.

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