Conveyors: power-driven – Conveyor system for moving a specific load as a separate unit – System includes an oscillating or reciprocating load...
Reexamination Certificate
2005-11-15
2008-09-30
Bidwell, James R (Department: 3651)
Conveyors: power-driven
Conveyor system for moving a specific load as a separate unit
System includes an oscillating or reciprocating load...
C198S468010, C414S217000
Reexamination Certificate
active
07428958
ABSTRACT:
A substrate conveyor apparatus carries a substrate such as reticle. A substrate conveyance method and an exposure apparatus reliably adhere a substrate to the lower surface of a chuck. A movable stage can move in the horizontal direction and is equipped with a chuck having an adhesion surface that faces down for adhering a substrate. An up-down means equipped with an up-down table is positionable in a position below the substrate and within the movement range of the movable stage, and a conveyance means equipped with a conveyor arm carries the substrate to the up-down means.
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Japanese Search Report dated Feb. 14, 2006 for International Application No. PCT/JP2005/020704, 2 pages.
Bidwell James R
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Nikon Corporation
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