Substrate conveying system

Details Substrate conveying system Substrate conveying system

1995-07-19

1997-06-17

Porta, David P.

X-ray or gamma ray systems or devices

Accessory

Object holder or support

378 34, 269 21, H01L 2168

Patent

active

056404409

ABSTRACT:
A substrate conveying system includes an attracting device for attracting a substrate with reduced pressure, a moving device for relatively moving the substrate relative to the attracting device, and a detecting device for detecting the pressure of the attracting device during the relative movement of the substrate to thereby obtain positional information related to the substrate.

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