Substrate conveying device and method of controlling the same

Details Substrate conveying device and method of controlling the same Substrate conveying device and method of controlling the same

1992-12-21

1997-06-24

Underwood, Donald W.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

1984641, 294907, 414786, B65G 6500

Patent

active

056412649

ABSTRACT:
A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined force.

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