Substrate conveyer robot

Details Substrate conveyer robot Substrate conveyer robot

2007-03-20

2007-03-20

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490040, C901S015000, C901S021000

Reexamination Certificate

active

10735614

ABSTRACT:
A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first spindle is rotated by a second motor independent of rotation of the base, is positioned coaxially with the pivotal center, and one end of a first arm is attached to the first spindle. A second spindle on the other end of the first arm is rotated by a gear ratio 2:1, and one end of a second arm is attached to the second spindle. A third spindle is carried on the other end of the second arm and is rotated by a gear ratio 1:2. One end of a third arm is attached to the third spindle, and a hand for holding a substrate is attached on the other end of the third arm.

REFERENCES:
patent: 5102280 (1992-04-01), Poduje
patent: 5584647 (1996-12-01), Uehara et al.
patent: 5741113 (1998-04-01), Bacchi et al.
patent: 5765444 (1998-06-01), Bacchi et al.
patent: 11-33948 (1999-02-01), None
patent: 2000-133690 (2000-05-01), None

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