Substrate-container measuring device, and...

Details Substrate-container measuring device, and... Substrate-container measuring device, and...

2005-09-13

2005-09-13

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S244000

Reexamination Certificate

active

06943899

ABSTRACT:
A substrate-container measuring device has a kinematic plate10having securing pins12provided at positions defined by the SEMI standards. There is provided an optical distance-measuring sensor14, in which a relative position between the optical distance-measuring sensor14and the kinematic plate10is fixed. A substrate-container measuring jig20is placed on the kinematic plate10. The substrate-container measuring jig20has a base plate22to be placed on the kinematic plate10, and a slide plate24that is slidable over the base plate22. The base plate22has a group of grooves which uniquely determine a relative position between the base plate22and the kinematic plate10as a result of being fitted with the corresponding securing pins12.

REFERENCES:
patent: 6760115 (2004-07-01), Shimizu et al.
patent: 6762399 (2004-07-01), Shimizu
patent: 2001-189371 (2001-07-01), None

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