Substrate coating unit and substrate coating method

Details Substrate coating unit and substrate coating method Substrate coating unit and substrate coating method

2006-04-04

2006-04-04

Koch, George (Department: 1734)

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to condition of coating material

C118S063000, C239S076000

Reexamination Certificate

active

07022190

ABSTRACT:
The present invention is a coating unit for coating a substrate with a coating solution, comprising a coating solution discharge member for discharging the coating solution to the substrate which is positioned in a downward part. A lower surface of the coating solution discharge member is in a shape having a length longer, at least, than the radius of the substrate and having a narrow width. A coating solution discharge port is disposed in a portion of the coating solution discharge member, facing the center of the substrate, while a solvent mist discharge port for discharging a solvent mist of the coating solution is disposed in a portion facing a peripheral portion including an outer edge potion of the substrate, when the coating solution discharge member is positioned above the radius of the substrate.

REFERENCES:
patent: 5815762 (1998-09-01), Sakai et al.
patent: 5919520 (1999-07-01), Tateyama et al.
patent: 5935331 (1999-08-01), Naka et al.
patent: 5942035 (1999-08-01), Hasebe et al.
patent: 6207231 (2001-03-01), Tateyama
patent: 6796517 (2004-09-01), Pike
patent: 2001/0003964 (2001-06-01), Kitano et al.
patent: 06-226181 (1994-08-01), None
Machine Translation of JP06-226181 (see Foreign patents above).

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