Substrate coating unit and substrate coating method

Details Substrate coating unit and substrate coating method Substrate coating unit and substrate coating method

2005-03-01

2005-03-01

Fiorilla, Chris (Department: 1734)

Coating apparatus

Projection or spray type

With mask or stencil

C118S504000, C118S321000, C118S323000, C118S305000

Reexamination Certificate

active

06860945

ABSTRACT:
The present invention is a coating unit for applying a coating solution to a substrate which includes: a discharge nozzle for reciprocating in a predetermined direction above the substrate and discharging the coating solution to the substrate; a holder for holding the substrate and horizontally movable in one direction perpendicular to the predetermined direction; and a cover for covering an upper face of the substrate when the substrate is moved in the one direction to be more forward than the discharge nozzle as viewed from a plane, wherein a lower face of the cover is inclined such as to be higher on the discharge nozzle side. According to the present invention, the cover covering the upper face of the substrate restrains a solvent from evaporating from the coating solution applied on the substrate to secure flatness of a coating film.

REFERENCES:
patent: 5942035 (1999-08-01), Hasebe et al.
patent: 6416583 (2002-07-01), Kitano et al.

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