Substrate coated with an MgO-layer

Details Substrate coated with an MgO-layer Substrate coated with an MgO-layer

1998-12-02

2000-11-21

Speer, Timothy M.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428701, 428702, 345 60, B32B 1700

Patent

active

061500305

ABSTRACT:
A substrate coated has at least one MgO-layer and an extent of at least 100 mm.times.100 mm. The layer has a predominant peak in the measuring diagram of the .THETA.-2.THETA.-method and the density of the material of the layer is at least 80% of the density of stoichiometric MgO-bulk material, which is .rho.=3.58 g/cm.sup.3.

REFERENCES:
patent: 5770921 (1998-06-01), Aoki
patent: 5938494 (1999-08-01), Betsui
European Search Report for Priority Application 98121350.7, iss. Mar. 2, 1999.
Kaneko, et al. "Preparation of MgO Thin Films by RF Magnetron Sputtering", Japanese Journal of Applied Physics, br. 30, nr. 5, May 30, 1991.
Bruley, et al., Nanostructure and chemistry of a (100) MgO/(100) GaAs interface, Applied Physics Letters, br. 65, nr. 5, Aug. 1, 1994.
Ishishara, et al., "Structure of MgO Films Prepared by Ion Beams Sputtering", Journal of Ceramic society of Japan, Inter. Addition, br. 97, nr. 8, Aug. 1, '89.

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