Substrate cleaning tool and substrate cleaning apparatus

Details Substrate cleaning tool and substrate cleaning apparatus Substrate cleaning tool and substrate cleaning apparatus

2006-03-14

2006-03-14

Kim, John (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S088200, C015S088100, C015S102000

Reexamination Certificate

active

07010826

ABSTRACT:
A substrate cleaning tool having little particle sticking to the tool and a substrate cleaning apparatus having the substrate cleaning tool are provided. The substrate cleaning tool23has a plurality of thready brush members46in a bundle. The brush members46are capable of passing cleaning liquid through and ejecting the cleaning liquid through respective surfaces of the members46. In operation, the substrate cleaning tool23is brought into contact with a substrate W in their relative movement in order to clean the substrate W. As the cleaning liquid is ejected from the surfaces of the brash members46, particles are washed away from the surfaces of the brash members46. Consequently, it is possible to eliminate a possibility that the particles etc. are transferred to the substrate W.

REFERENCES:
patent: 1930044 (1933-10-01), Farquhar
patent: 3750213 (1973-08-01), Hansen
patent: 3827099 (1974-08-01), Allaire et al.
patent: 4039261 (1977-08-01), Evans
patent: 4066366 (1978-01-01), Reynolds
patent: 4323085 (1982-04-01), Rohm
patent: 4730361 (1988-03-01), Koffler
patent: 4958596 (1990-09-01), Belan
patent: 5858112 (1999-01-01), Yonemizu et al.
patent: 6115867 (2000-09-01), Nakashima et al.
patent: 6126530 (2000-10-01), Hirata
patent: 6131233 (2000-10-01), Bolton et al.
patent: 6175983 (2001-01-01), Hirose et al.
patent: 6308361 (2001-10-01), Matsuda et al.
patent: 6464796 (2002-10-01), Vail et al.
patent: 6554010 (2003-04-01), Hirose et al.
patent: 08-241880 (1996-09-01), None

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