Substrate cleaning apparatus and cleaning member

Details Substrate cleaning apparatus and cleaning member Substrate cleaning apparatus and cleaning member

2005-01-18

2005-01-18

Till, Terrence R. (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S088200, C015S102000

Reexamination Certificate

active

06842933

ABSTRACT:
A cleaning apparatus for cleaning a substrate includes a cleaning member, a cleaning member carrier for holding the cleaning member and bringing the cleaning member into contact with a substrate to be cleaned, and a sensor for detecting a presence/absence of a cleaning held by the cleaning member carrier. The substrate is cleaned by causing relative movement between the cleaning member and the substrate while keeping the cleaning member and the substrate in contact with each other.

REFERENCES:
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5901403 (1999-05-01), Yang
patent: 6412134 (2002-07-01), Oikawa
Patent Abstracts of Japan, entitled “Substrate Cleaning Equipment”, by Nakabo Yasushi.

Affiliated with

Also associated with

Rating

Substrate cleaning apparatus and cleaning member does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate cleaning apparatus and cleaning member, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate cleaning apparatus and cleaning member will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3367666