Substrate cleaning apparatus

Details Substrate cleaning apparatus Substrate cleaning apparatus

2005-02-08

2005-02-08

Till, Terrence R. (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S077000, C015S102000

Reexamination Certificate

active

06851152

ABSTRACT:
A substrate cleaning apparatus allows an end face and/or a bevel face of a substrate to be scrub-cleaned in a simple and effective manner. The apparatus has a plurality of rotatable substrate rotating rollers for gripping a periphery of the substrate and rotating the substrate, a cleaning roller capable of rotating and having a cleaning member which is to be brought into contact with the end face and/or the bevel face of the substrate so as to apply scrub-cleaning to the end face and/or the bevel face, and a power transmission mechanism for transmitting a rotating force of the substrate rotating roller to the cleaning roller so as to rotate the cleaning roller.

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Pending U.S. Appl. No. 09/635,848 Hiroshi Tomita et al. filed Aug. 11, 2000.

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