Substrate characterization device and method for...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S671000, C324S071100, C324S452000

Reexamination Certificate

active

07855565

ABSTRACT:
A substrate characterization device is provided which includes a sensor module and a processor. The sensor module has at least one contact surface configured to contact the substrate, the sensor module configured to measure a variance of capacitance in at least two dimensions of the substrate, the sensor module further configured to generate a signal indicative of the measured variance. The processor is in operative communication with a memory module and configured to execute a series of programmable instructions for making a comparison of the signal generated by the sensor module with at least one reference signal. The processor is further configured to generate at least one characterization signal based on the comparison.

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