Substrate cassette mapper

Details Substrate cassette mapper Substrate cassette mapper

2007-08-14

2007-08-14

Brahan, Thomas J (Department: 3654)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C250S559400, C340S686500

Reexamination Certificate

active

10413102

ABSTRACT:
A mechanism for mapping the contents of a cassette which is used for delivering substrates to a system for processing semiconductor and similar materials which is independent of load port or loading robot movement. The mapping mechanism includes a U-shaped probe having a photo emitter/receptor mounted on opposing surfaces of its legs. The U-shaped probe is mounted on a carriage for rotation about its longitudinal axis. The carriage is, in turn, mounted on a track for movement over the height of the cassette. The mapping mechanism is mounted on the loading port frame of the processing system adjacent to the load port and is moved into and out of it sensing position by interaction with a cam.

REFERENCES:
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 6053983 (2000-04-01), Saeki et al.
patent: 6106213 (2000-08-01), Denker
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6642533 (2003-11-01), Haraguchi et al.
patent: 6729823 (2004-05-01), Sakata et al.
patent: 6824344 (2004-11-01), Otaguro
patent: 2004/0099826 (2004-05-01), Igarashi et al.
patent: 2004/0262548 (2004-12-01), Komatsu
patent: 2001-60615 (2001-06-01), None

Affiliated with

Also associated with

Rating

Substrate cassette mapper does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate cassette mapper, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate cassette mapper will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3895232