Substrate cassette and side rail therefor

Details Substrate cassette and side rail therefor Substrate cassette and side rail therefor

1998-03-11

2000-03-14

Johnson, Blair M.

Supports: racks

Special article

Platelike

118500, 206454, A47G 1908

Patent

active

060360313

ABSTRACT:
A side rail for closing each of side walls of a substrate cassette of a rectangular configuration is disclosed which is capable of preventing deformation of the side rail and a dimensional error thereof. The side rail includes a partition plate formed on a surface thereof with ribs for receiving a plurality of substrates therein in a manner to space them from each other. The ribs are arranged so as to define partition grooves therebetween. The side rails also includes a cover member arranged for covering the partition plate and including rib covers for covering the ribs and groove covers arranged between the rib covers for covering the partition grooves. Also, a substrate cassette having the side rails incorporated therein is disclosed.

REFERENCES:
patent: 5042671 (1991-08-01), Bischoff et al.

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