Substrate carrying method thereof

Details Substrate carrying method thereof Substrate carrying method thereof

2005-05-29

2010-02-02

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

C414S627000, C414S806000

Reexamination Certificate

active

07654786

ABSTRACT:
A shuttle is disclosed in which a large-sized substrate is prevented from sagging under its weight or from slipping. The shuttle includes a body, support pins supporting sides of the substrate, and shuttle arms provided to sides of the body to rotate in an axial direction and move in a right-to-left direction. The support pins are coupled with the shuttle arms, respectively. A pair of center supports support center parts of sides of the substrate not supported by the support pins. The center supports are movably coupled to a main frame in a front-to-rear direction. A driving unit moves and rotates the shuttle arms in the right-to-left direction. The driving unit moves the center supports in the front-to-rear direction using the main frame. A vacuum instrument assembly is provided to each of the support pins to securely hold the substrate by a vacuum force.

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patent: 6988879 (2006-01-01), Ho et al.
patent: 7044706 (2006-05-01), Jung

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