Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-03-29
2011-03-29
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S075000, C355S077000
Reexamination Certificate
active
07916268
ABSTRACT:
The present invention relates to a substrate carrying device that carries a substrate such as a reticle, a substrate carrying method, and an exposure device.The substrate carrying device includes a movable stage having a chuck and being movable in a horizontal direction, the chuck having a sucking surface which faces downward and sucking a substrate on the sucking surface; and a fixed blind disposed below the movable stage. The movable stage moves to a position apart from the fixed blind in a horizontal direction and attaches and detaches the substrate. In addition, the substrate carrying device also includes a lifting portion having a lifting table which is movable in a movable range of the movable stage and is capable of being positioned below the movable stage; and a carrying portion having a carrying arm which carries the substrate to the lifting portion.
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Finnegan Henderson Farabow Garrett & Dunner LLP
Kreutzer Colin
Nguyen Hung Henry
Nikon Corporation
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