Substrate carrier and facility interface and apparatus...

Details Substrate carrier and facility interface and apparatus... Substrate carrier and facility interface and apparatus...

2006-05-23

2008-09-02

Fox, Charles A (Department: 3652)

Fluent material handling, with receiver or receiver coacting mea

Diverse fluid containing pressure filling systems involving...

Gas treatment

C206S213100, C206S711000

Reexamination Certificate

active

07418982

ABSTRACT:
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

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Eric Lebreton, “Confined Space”, Transport Canada Canutec, pp. 1-5, at http://www.tc.gc.ca/canutec/en/articles/documents/confined.htm Mar. 28, 2006.

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