Substrate carrier and facility interface and apparatus...

Fluent material handling – with receiver or receiver coacting mea – Diverse fluid containing pressure filling systems involving... – Gas treatment

Reexamination Certificate

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Details

C206S213100

Reexamination Certificate

active

07918251

ABSTRACT:
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

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