Fluent material handling – with receiver or receiver coacting mea – Diverse fluid containing pressure filling systems involving... – Gas treatment
Reexamination Certificate
2011-04-05
2011-04-05
Fox, Charles A (Department: 3652)
Fluent material handling, with receiver or receiver coacting mea
Diverse fluid containing pressure filling systems involving...
Gas treatment
C206S213100
Reexamination Certificate
active
07918251
ABSTRACT:
A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.
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Hsiao Yi-Li
Yu Chen-Hua
Duane Morris LLP
Fox Charles A
Taiwan Semiconductor Manufacturing Co. Ltd.
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