Substrate based on temperature sensing

Details Substrate based on temperature sensing Substrate based on temperature sensing

2011-04-12

2011-04-12

Caputo, Lisa M (Department: 2855)

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

C327S513000

Reexamination Certificate

active

07922389

ABSTRACT:
A method for providing accurate temperature sensing of a substrate utilizing the PN junction of a transistor formed on the substrate is described.

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patent: 7333038 (2008-02-01), Aslan
patent: 2007/0237207 (2007-10-01), Aslan et al.

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