Substrate apparatus calibration and synchronization procedure

Details Substrate apparatus calibration and synchronization procedure Substrate apparatus calibration and synchronization procedure

2005-09-13

2005-09-13

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S245000

Reexamination Certificate

active

06944517

ABSTRACT:
A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device.

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patent: 6327512 (2001-12-01), Hirata et al.
patent: 6459947 (2002-10-01), Hirata et al.

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