Substrate and method of forming substrate for fluid ejection...

Details Substrate and method of forming substrate for fluid ejection... Substrate and method of forming substrate for fluid ejection...

2006-03-28

2006-03-28

Pham, Hai (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S063000

Reexamination Certificate

active

07018015

ABSTRACT:
A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, forming at least one hole in the mask layer, filling the trench and the at least one hole, forming a first portion of the opening in the substrate from the second side of the substrate to the mask layer, and forming a second portion of the opening in the substrate from the second side of the substrate through the at least one hole in the mask layer to the first side of the substrate.

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