Substrate aligning system

Details Substrate aligning system Substrate aligning system

2007-07-10

2007-07-10

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

11438225

ABSTRACT:
The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers (220) push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (220), the contacting portion (211) of a contacting member (210) contacts a chip (Wa) of the wafer (W). The contacting member (210) is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.

REFERENCES:
patent: 4491787 (1985-01-01), Akiyama et al.
patent: 5046909 (1991-09-01), Murdoch
patent: 5533243 (1996-07-01), Asano
patent: 5642056 (1997-06-01), Nakajima et al.
patent: 5982132 (1999-11-01), Colby
patent: 6043667 (2000-03-01), Cadwallader et al.
patent: 6332751 (2001-12-01), Kozawa et al.
patent: 6417683 (2002-07-01), Colby
patent: 8-335624 (1996-12-01), None
patent: 9-275064 (1997-10-01), None
patent: 2000-133696 (2000-05-01), None
patent: 2002-368065 (2002-12-01), None

Affiliated with

Also associated with

Rating

Substrate aligning system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate aligning system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate aligning system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3776251