Substrate aligning device using interference light generated by

Details Substrate aligning device using interference light generated by Substrate aligning device using interference light generated by

1992-11-25

1994-09-13

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356349, 356356, 356401, G01B 902

Patent

active

053473566

ABSTRACT:
An aligning device for aligning a substrate with a predetermined point on the basis of a detection signal from a photoelectric detector uses interference light generated by light diffracted from a diffraction grating. A calculating device calculates at least one of a crossing angle of two coherent beams irradiating the grating and the rotational error of a crossing line between a plane containing principal rays of the beams and the surface of the substrate, with respect to the direction of arrangement of the grating, based on the phase difference between detection signals of the photoelectric detector corresponding to interference light generated from different portions of the crossing area. The output of the calculating device may be used to adjust the crossing angle and/or to correct the rotational error.

REFERENCES:
patent: 4636077 (1987-01-01), Nomura et al.
patent: 4710026 (1987-12-01), Magome et al.
patent: 5070250 (1991-12-01), Komatsu et al.

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