Substrate accommodating tray pallet and substrate transfer...

Details Substrate accommodating tray pallet and substrate transfer... Substrate accommodating tray pallet and substrate transfer...

2004-09-23

2009-08-04

Trinh, Minh (Department: 3729)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S759000, C198S465100, C414S286000

Reexamination Certificate

active

07568281

ABSTRACT:
A substrate accommodating tray pallet has a substrate in a horizontal state, includes openings for inserting substrate removal tools for raising the substrate, and is used for transferring substrate accommodating trays which can be vertically stacked, wherein: the substrate accommodating trays are to be mounted on an upper surface; and substrate removal tool insertion openings for inserting the substrate removal tools are positioned so as to oppose openings of the mounted substrate accommodating trays.

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