Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1987-01-08
1989-04-11
Lee, Mary C.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556 88, 556 95, 556413, 556416, 556417, 556418, 556422, 556436, 556465, 556482, 556485, C07F 702, C07F 722, C07F 730
Patent
active
048208299
ABSTRACT:
There are disclosed novel substituted o-phthalaldehydes of formula I ##STR1## wherein at least one of the substituents R.sub.1, R.sub.2, R.sub.3, R.sub.4 is Q(alkyl).sub.3, --CH.sub.2 --Q(alkyl).sub.3, --O--Q(alkyl).sub.3, --Q(aryl).sub.3 or --Q(alkylenearyl).sub.3, wherein Q is Si, Sn or Ge, the alkyl moieties contain 1 to 12 carbon atoms, the aryl groups contain 6 or 12 ring carbon atoms and the alkylene radicals contain 1 to 4 carbon atoms, and each of the remaining substituents R.sub.1 to R.sub.4 is a hydrogen or halogen atom or a cyano, nitro, carboxyl or hydroxyl group, a C.sub.1 -C.sub.4 alkoxy, C.sub.1 -C.sub.4 alkylthio or an alkoxycarbonyl group containing 1 to 4 carbon atoms in the alkoxy moiety.
The novel o-phthalaldehydes can be polymerized to give polymers that can be used as photoresists.
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Ciba-Geigy Corporation
Falber Harry
Lee Mary C.
Northington Zinna
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