Abrading – Machine – Endless band tool
Reexamination Certificate
2006-07-18
2006-07-18
Eley, Timothy V. (Department: 3724)
Abrading
Machine
Endless band tool
C451S490000, C451S533000, C451S538000
Reexamination Certificate
active
07077733
ABSTRACT:
A subpad support for use in a web format or belt format polishing apparatus for polishing one or more layers of semiconductor device structures. The subpad support includes a subpad retention element for non-adhesively securing the subpad thereto. The subpad support may also include one or more lips protruding therefrom so as to at least substantially inhibit lateral movement of the subpad relative to the subpad support. Polishing apparatus including the subpad support are also disclosed. The polishing pads of such polishing apparatus may be at least partially moved away from the subpad or subpad support so as to facilitate assembly of a subpad with the subpad support or removal of the subpad from the subpad support without damaging the polishing pad. Methods of removably securing a subpad to the subpad support, removing the subpad from the subpad support, and replacing another subpad on the subpad support, as well as polishing methods, are also disclosed.
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Eley Timothy V.
Micro)n Technology, Inc.
TraskBritt
LandOfFree
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