Subpad having robust, sealed edges

Details Subpad having robust, sealed edges Subpad having robust, sealed edges

2007-04-10

2007-04-10

Morgan, Eileen P. (Department: 3723)

Abrading

Flexible-member tool, per se

C451S530000, C451S533000, C451S296000

Reexamination Certificate

active

10273194

ABSTRACT:
Provided are encapsulated belts and encapsulated pads for use in a variety of polishing application, including the chemical-mechanical polishing and planarization of semiconductor wafers and other workpieces. The encapsulated belts and pads are characterized by a robust seal between a polishing layer of the pad or belt and the edges of the subpad layer of the pad or belt. The robust seal is accomplished by casting a polymer directly over the subpad layer. The edges of the subpad layer may include one or more functional features that promote the formation of a watertight and slurry-resistant seal when the subpad layer is covered with a cast polymer. Also provided is a method of producing a robust seal between the polishing layer and the edge region of the subpad by encapsulating a subpad layer with a polymeric material.

REFERENCES:
patent: 6123609 (2000-09-01), Satou
patent: 6126532 (2000-10-01), Sevilla et al.
patent: 6368197 (2002-04-01), Elledge
patent: 6413873 (2002-07-01), Li et al.
patent: 6439968 (2002-08-01), Obeng
patent: 6464576 (2002-10-01), Freeman et al.
patent: 6485359 (2002-11-01), Li et al.
patent: 6491570 (2002-12-01), Sommer et al.
patent: 6561889 (2003-05-01), Xu et al.
patent: 6613200 (2003-09-01), Li et al.
patent: 6733373 (2004-05-01), Yang et al.
patent: WO 01/15864 (2000-08-01), None
patent: WO 01/83167 (2001-05-01), None

Affiliated with

Also associated with

Rating

Subpad having robust, sealed edges does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Subpad having robust, sealed edges, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Subpad having robust, sealed edges will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3772323