Electrical resistors – With base extending along resistance element – Resistance element and/or terminals printed or marked on base
Patent
1992-07-02
1994-02-15
Lateef, Marvin M.
Electrical resistors
With base extending along resistance element
Resistance element and/or terminals printed or marked on base
338 64, 338314, H01C 1012
Patent
active
052870820
ABSTRACT:
A submicron resistor having negligible parasitic capacitance includes an isolated released beam carried on a single crystal silicon wafer. The resistor is fabricated by defining a resistor region in the substrate, doping the region to produce the desired resistivity, and etching around the region to produce a resistive island. The island is then isolated from the substrate by oxidation, and is released by removing the oxide to produce an isolated, released resistor beam.
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Arney Susanne C.
MacDonald Noel C.
Yao Jun J.
Cornell Research Foundation Inc.
Lateef Marvin M.
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