Subject positioning device for optical interferometer

Details Subject positioning device for optical interferometer Subject positioning device for optical interferometer

1997-10-02

1999-03-23

Kim, Robert

Optics: measuring and testing

By particle light scattering

With photocell detection

356346, 356359, G01B 902

Patent

active

058867864

ABSTRACT:
A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

REFERENCES:
patent: 5721616 (1998-02-01), Domenizali

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