Subject positioning device for optical interferometer

Details Subject positioning device for optical interferometer Subject positioning device for optical interferometer

1996-12-30

1999-11-30

Kim, Robert H.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, G01B 902

Patent

active

059952229

ABSTRACT:
A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

REFERENCES:
patent: 4171159 (1979-10-01), White
patent: 4201473 (1980-05-01), Domenicali et al.
patent: 5666198 (1997-09-01), Stenton

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