Fluid handling – Systems – Multiple inlet with single outlet
Reexamination Certificate
2005-03-22
2005-03-22
Bueker, Richard (Department: 1763)
Fluid handling
Systems
Multiple inlet with single outlet
C392S386000, C392S400000, C392S401000, C118S692000, C118S697000, C118S712000, C118S726000
Reexamination Certificate
active
06868869
ABSTRACT:
A delivery system and method for vaporizing and delivery of vaporized solid and liquid precursor materials at sub-atmospheric pressures between a heatable vaporization vessel and a processing tool. The system includes a pressure regulator internally positioned within the vaporization vessel and in fluid communication with a downstream mass flow controller to maintain a consistent flow of vaporized source material. The system further comprises introducing a carrier/diluent gas for diluting the vaporized source material before entry into the processing tool. A venturi is positioned directly upstream of the processing tool and provides for mixing of the carrier gas with the vaporized source material while providing the negative pressure required to open the gas pressure regulator within the vaporization vessel.
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Advanced Technology & Materials Inc.
Bueker Richard
Chappuis Margaret
Hulquist, Esq. Steven
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