Organic compounds -- part of the class 532-570 series – Organic compounds – Nitriles
Patent
1988-12-27
1993-06-08
Brust, Joseph Paul
Organic compounds -- part of the class 532-570 series
Organic compounds
Nitriles
556416, 556417, 558402, C07C25534
Patent
active
052181367
ABSTRACT:
A styryl compound of the formula: ##STR1## wherein R.sub.1, R.sub.2 and R.sub.11 are the same or different and a hydrogen atom, an optionally substituted alkyl, alkenyl or aralkyl group or R.sub.1 and R.sub.2 may form a ring together with the nitrogen atom to which they are bonded, which ring may include at least one hetero atom in addition to said nitrogen atom; R.sub.10 is an optionally substituted alkylene group; R.sub.3 is --OH, --OCOR.sub.5 or --OSi(R.sub.5).sub.3 in which R.sup.5 is an alkyl group; R.sub.12 and R.sub.13 are independently a hydrogen atom, an optionally substituted lower alkyl or alkoxy group, an amide group or a halogen atom; X, Y, W and Z are the same or different and an electron attracting group, and n is a number of 2-15, which is suitable as a light absorber in a photoresist composition.
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Furuta Akirhiro
Hanawa Ryotaro
Hioki Takeshi
Konishi Shinji
Tomioka Jun
Brust Joseph Paul
Sumitomo Chemical Company Limited
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