Stylus probe for measuring workpiece surface characteristics

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

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Details

324690, 33503, 33559, G01R 2726

Patent

active

055171249

ABSTRACT:
A stylus probe with both a contact sensing and a capacitive proximity sensing capability provided by positioning a capacitive sensor means (10) on the tip-end of a grounded, thin conductive stainless steel tube (12) so that the capacitive sensor means (10) is electrically insulated from the grounded tube, and a conductive lead wire (16), conductively attached to the capacitive sensor means (10), extends through the tube (12) with an electrically insulative material (18) dispersed between the tube (12) and the lead wire (16) to electrically insulate and space the lead wire (16) from the tube (12). The connecting-end of the tube (12) has an elastomer material (20) and (22) placed in an annular fashion and in direct contact with a mounting means and the tube (12) so as to dampen vibrations of the tube (12) caused by probe deflection. The stylus probe further comprises a tubular member with a length:width ratio of from about 40:1 to about 300:1 to give up to a 45.degree. deflection capability thus avoiding damage to probe and workpiece while functioning as a contact probe.

REFERENCES:
patent: 4333238 (1982-06-01), McMurtry
patent: 4409541 (1983-10-01), Richards
patent: 4498043 (1985-02-01), Heathcote
patent: 4764722 (1988-08-01), Coughlin et al.
patent: 4794321 (1988-12-01), Dotsko
patent: 4823071 (1989-04-01), Ding et al.
patent: 5155444 (1992-10-01), Green et al.
patent: 5189377 (1993-02-01), Rhoades et al.
patent: 5270664 (1993-12-01), McMurtry et al.

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