Studless thin film magnetic head and process for making the same

Details Studless thin film magnetic head and process for making the same Studless thin film magnetic head and process for making the same

1995-07-31

1997-08-19

Evans, Jefferson

Dynamic magnetic information storage or retrieval

Head

Core

360123, 2960314, 2960315, 2960325, G11B 5147, G11B 542

Patent

active

056594518

ABSTRACT:
A method for pattern-etching thick alumina layers in the manufacture of thin film heads (TFH) by using compatible metallic mask layers and a dilute (1:2) HF in water etchant. The deep alumina etching facilitates a studless TFH device where the coil and bonding pads are deposited and patterned simultaneously, and vias are later etched through the alumina overcoat layer to expose the bonding pads. The method also enables the etching of scribe-line grooves of street and alleys across the wafer for sawing and machining of sliders. These grooves eliminate most alumina chipping due to stress and damage introduced by the sawing and machining operations. Similarly, pattern-etching of the alumina undercoat facilitates the formation of precise craters for recessed structures. These can improve planarity and alleviate problems related to adverse topography and elevated features of TFH devices.

REFERENCES:
patent: 3908194 (1975-09-01), Romakiw
patent: 4016601 (1977-04-01), Lazzari
patent: 4190871 (1980-02-01), Walraven
patent: 4190872 (1980-02-01), Jones, Jr. et al.
patent: 4219853 (1980-08-01), Albert et al.
patent: 4281357 (1981-07-01), Lee
patent: 4315291 (1982-02-01), Lazzari
patent: 4351698 (1982-09-01), Osborne
patent: 4379022 (1983-04-01), Melcher et al.
patent: 4489105 (1984-12-01), Lee
patent: 4592801 (1986-06-01), Hara et al.
patent: 4624048 (1986-11-01), Hinkel et al.
patent: 4652954 (1987-03-01), Church
patent: 4791719 (1988-12-01), Kobayashi et al.
patent: 4800454 (1989-01-01), Schwarz et al.
patent: 4856181 (1989-08-01), Pichler et al.
patent: 4896417 (1990-01-01), Sawada et al.
patent: 4938928 (1990-07-01), Koda et al.
patent: 4943882 (1990-07-01), Wada et al.
patent: 4949209 (1990-08-01), Imaraka et al.
patent: 5059278 (1991-10-01), Cohen et al.
patent: 5195233 (1993-03-01), Kitamura et al.
patent: 5218497 (1993-06-01), Tanabe et al.
patent: 5253134 (1993-10-01), Kato et al.
patent: 5256249 (1993-10-01), Hsie et al.
patent: 5269879 (1993-12-01), Rhoades et al.
patent: 5272111 (1993-12-01), Kosaki
patent: 5293288 (1994-03-01), Ishikawa et al.
patent: 5326429 (1994-07-01), Cohen et al.
patent: 5459501 (1995-10-01), Lee et al.
patent: 5462637 (1995-10-01), Thiele
patent: 5539598 (1996-07-01), Denison et al.
patent: 5563754 (1996-10-01), Gray et al.
patent: 5566038 (1996-10-01), Keel et al.
J. Khan et al., "Applications of Laser Etching In Thin Film Head Fabrication", Extended Abstracts, The Electrochemical Society, Fall Meeting, Hollywood, Florida, Oct. 1989, pp. 438-439.
J. Khan et al., "Applications of Laser Etching in Thin Film Head", Abstract No. 304, Extended Abstract, vol. 89-2, Fall Meeting Hollywood, Florida, Oct. 15-20, 1989.
D. Chapman, "A New Approach to Making Thin Film Head-Slider Devices", IEEE Transactions on Magnetic, vol. 25, No. 5., Sep. 1989.
U. Cohen, "A Studless Thin Film Head Produced by Deep Alumina Etching", The Electrochemical Society Conference, Symposium on Magnetic Material, Processes and Devices, New Orleans, Louisiana, Oct. 10-15, 1993.
U. Cohen, "A Studless Thin Film Head Produced by Deep Alumina Etching", Paper #243, The Electrochem. Soc. Conf., New Orleans, Louisiana, Oct. 10-15, 1993, and in the ECS Proceedings: 3rd Int. Symp. on Magnetic Materials, Processes and Devices, edited by L.T. Romankiw and D.A. Herman, NJ (1994). Oct. 1993.
Shyam C. Das and Jamal Khan, "Applications of Laser Etching In Thin Film Head Fabrication", Proceedings of the Symposium on Magnetic Materials, Processes and Devices, The Electrochemical Society, Fall Meeting, Hollywood, Florida, Oct. 1989, pp. 279-288.

Affiliated with

Also associated with

Rating

Studless thin film magnetic head and process for making the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Studless thin film magnetic head and process for making the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Studless thin film magnetic head and process for making the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1109219