Structures and processes for fabricating field emission cathodes

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

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445 50, 313336, H01J 902, H01J 1924

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active

051414597

ABSTRACT:
The present invention relates generally to new structures for a field emission cathode and processes for fabricating the same. The field emission is made of any material that is capable of emitting electrons under the influence of an electrical potential. The field emission cathode has several unique three dimensional structures. The basic structure comprises of a layer of material with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.

REFERENCES:
patent: 3453478 (1969-07-01), Shoulders et al.
patent: 3497929 (1970-03-01), Shoulders et al.
patent: 3665241 (1972-05-01), Spindt et al.
patent: 3753022 (1973-08-01), Fraser, Jr.
patent: 3755704 (1973-08-01), Spindt et al.
patent: 3855499 (1974-12-01), Yamada et al.
patent: 3921022 (1975-11-01), Levine
patent: 3970887 (1976-07-01), Smith et al.
patent: 3998678 (1976-12-01), Fukase et al.
patent: 4307507 (1981-12-01), Gray et al.
patent: 4338164 (1982-07-01), Spohr
patent: 4513308 (1985-04-01), Greene et al.
patent: 4721885 (1988-01-01), Brodie
patent: 4857799 (1989-08-01), Spindt et al.
patent: 4889588 (1989-12-01), Fior
C. A. Spindt, "A Thin-Film Field-Emission Cathode," J. Appl. Phy., vol. 39, No. 7, pp. 3504-3505 (1968).
G. J. Campisi, et al., "Microfabrication of Field Emission Devices for Vacuum Integrated Circuits Orientation Dependent Etching," Material Res. Soc. Symp. Proc. vol. 76, pp. 67-72 (1987).
I. Brodie, "Physical Considerations in Vacuum Microelectronics Devices," IEEE Transactions on Electron Devices, vol. 36, No. 11, pp. 2641-2644 (Nov. 1989).
H. H. Busta, et al., "Micromachined Thungsten Field Emitters" Extended Abstracts, No. 1046B, vol. 86, No. 1, pp. 403-404 (May 1986).
G. Lubrunie, et al, "Novel Type of Emissive Flat Panel Display: The Matrixed Cold-Cathode Microtip Fluorescent Display" Displays, pp. 37-40 (Jan. 1987).
W. J. Orvis, et al., "Modeling and Fabricating Micro-Cavity Integrated Vacuum Tubes," IEEE Transactions on Electron Devices, vol. 36, No. 11 pp. 2651-2658 (Nov. 1989).
H. H. Busta, et al, "Field Emission from Tungsten-Clad Silicon Pyramids," IEEE Transactions on Electron Devices, vol. 36, No. 11, pp. 2679-2685 (Nov. 1989).
R. A. Lee, et al., "Semiconductor Fabrication Technology Applied to Micrometer Values," IEEE Transactions on Electron Devices, vol. 36, No. 11, pp. 2703-2708 (Nov. 1989).
N. A. Cade, et al., "Wet Etching of Cusp Structures for Field-Emission Devices," IEEE Transactions on Electron Devices, vol. 36, No. 11, pp. 2709-2714 (Nov. 1989).
R. B. Marcus, et al., "Formation of Atomically Sharp Silicon Needles," IEDM, pp. 884-886 (1989).
W. J. Orvis et al., "A Progress Report on the Livermore Miniature Vacuum Tube Project," IEEE, IEDM, pp. 529-531 (1989).
B. Goodman, "Return of the Vacuum Tube," Discover Magazine, pp. 55-58 (Mar. 1990).

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