Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate
2008-09-26
2010-06-15
Lavarias, Arnel C (Department: 2872)
Optical: systems and elements
Polarization without modulation
By relatively adjustable superimposed or in series polarizers
C359S490020, C359S494010
Reexamination Certificate
active
07738172
ABSTRACT:
An optical imaging system for producing an optical image includes one or more powered optical elements with polarization aberration that degrade said optical image; and a polarization rotation system configured to reduce the contributions of the polarization aberration to the degradation of said optical image. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
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ASML Netherlands B.V.
Lavarias Arnel C
Pillsbury Winthrop Shaw & Pittman LLP
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